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Compound Molecular Pump
TP Series
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Oil-Free Clean Vacuum
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High vacuum state
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Lower noise
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High pumping speed
Overview
Compound molecular pump is composed of a turbomolecular pump and a drag pump. It combines the characteristics of a turbomolecular pump with a high pumping speed and high compression ratio when handling molecular flow, and a drag pump with a high pumping speed and high compression ratio at high pressures. This extends the application range of molecular pumps.The compound molecular pump is non-selective and exhibits no memory effects on the pumped gas. Due to its high compression ratio for gases with large molecular weights, it can achieve clean high vacuum and ultra-high vacuum without the need for a cold trap and oil baffle.
Features
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Oil-Free Clean Vacuum
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Achieves very low back pressure, reaching a high vacuum state.
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Higher pumping speed rapidly removes gases, accelerating the evacuation speed of the vacuum system.
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With virtually no moving parts internally, it results in lower noise and vibration, leading to lower maintenance costs.
Typical Applications
Model | TP-200 | TP-600 | TP-1200 | TP-1600 |
|---|---|---|---|---|
Overall dimension(mm) | 208*152*266 | 265*236*457 | 294*267*467 | 327*296*467 |
Pump body baking temperature(℃) | ＜ 80 | ＜ 100 | ＜ 120 | ＜ 120 |
Oil filling volume(ml) | / | 100 | 100 | 100 |
Pump weight(Kg) | ≈ 11 | ≈ 30 | ≈ 34 | ≈ 39 |
Installation direction | Any angle | Vertical ±5° | Vertical ±5° | Vertical ±5° |
Water cooling cooling water flow
(L/min) | / | / | / | 1 |
Cooling water temperature(℃) | / | / | / | ≤ 25 |
Ambient temperature(℃) | / | ≤ 28 | ≤ 28 | / |
Cooling method | Air cooling | Air cooling | Air cooling | Water cooling |
It is recommended to use a
backing pump(L/S) | ＜2 | 4~8 | 8~15 | 15 |
Downtime(min) | ＜6 | ＜6 | ＜7 | ＜8.5 |
Start time(min) | ＜6 | ＜4 | ＜5 | ＜6 |
Vibration value(μm) | ≤ 0.1 | ≤ 0.1 | ≤ 0.1 | ≤ 0.1 |
Use bearings | Imported ceramic bearings | Imported ceramic bearings | Imported ceramic bearings | Imported ceramic bearings |
Rated speed(rpm) | 30000 | 24000 | 24000 | 24000 |
Pumping rate(L/S) | 200 | 600 | 1200 | 1600 |
Front stage flange | KF25 | KF40 | KF40 | KF50 |
High vacuum flange | KF40 | KF40 | KF40 | KF40 |